Facilities
Facilities available in the Mesoscopic Physics Group
Fabrication Facilities
 |
Clean roomOur group has a small Class 100 clean room equipped with a laminar flow hood and a spinner in which wet processing is performed, as well as a larger Class 10000 clean room where deposition equipment is kept. A separate room houses the scanning electron microscope used for electron-beam lithography. |
 |
Tescan Field Emission Scanning Electron MicroscopeIn February 2007, our group obtained a Tescan MIRA LMH FESEM. This machine has a maximum acceleration voltage of 30 keV, and a minimum imaging resolution of the order of 2 nm, but it is also good at imaging devices at low acceleration voltages. The MIRA has been interfaced to the ElectronScribe pattern generation program and is primarily used for electron beam lithography. |
 |
CVD Furnace for nanotube growth |
 |
Homebuilt E-gun evaporatorThis e-gun evaporator is equipped with a glass bell jar and a 6-inch Varian diffusion pump. It has a 5-pocket, 3 kV linear Telemark e-gun and an in-situ plasma etcher. Base pressure is of order 1 x 10-7 Torr. |
 |
Edwards Thermal EvaporatorA smaller manual two-source thermal Edwards 306 coater is primarily used for depositing only clean metals such as high-purity gold, copper and aluminum. |
 |
Denton E-gun evaporatorA Denton 6 keV, 4-pocket e-gun evaporator is primarily used for evaporation of ferromagnetic materials and "dirty" metals for contacts. |
 |
Kulicke and Soffa wirebonder
|
 |
EtchersWe have a variety of home-made external and in situ etchers for surface cleaning of samples |
In addition to these major pieces of equipment, we also have essential device preparation equipment including a contact photolithography setup, optical microscopes, a Kulicke and Soffa ultrasonic wirebonder, and various etchers.
Measurement and characterization equipment
 |
Oxford Kelvinox 300 Dilution RefrigeratorOur Kelvinox 300 dilution refrigerator is equipped with a 12/14T superconducting solenoid, and is capable of going down to 15 mK. |
 |
Oxford Kelvinox MX100 Dilution RefrigeratorA newer Kelvinox MX100 diilution refrigerator is equipped with a two-axis 3T/1T superconducting solenoid, and is capable of going down to 15 mK. |
 |
Janis 3He refrigeratorOur Janis sorption pumped 3He refrigerator can be inserted into a dewar with a two-axis 3T/1T superconducting solenoid. |
 |
Thermomicroscopes AFM/MFM/EFM
|
